Foil-to-Foil System Integration Through Capillary Self-Alignment Directed by Laser Patterning
نویسندگان
چکیده
منابع مشابه
Dynamics of capillary self-alignment for mesoscopic foil devices
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2015
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2014.2321013